Integrated SAW-AO-deflector and photo-detector on Si

Described is the integration of a thin-film optical waveguide, a surface acoustic wave (SAW) guide, an acoustooptic Bragg deflector, a mode index lens, a mode filter, and two Schottky photodiodes on a Si substrate, where the piezoelectric, acoustic, optic, and acoustooptic properties of ZnO were used. A thin-film lens was fabricated by making use of a gradual film thickness change, the refractive index dispersion of the fundamental mode on the film thickness, and the mode cutoff property of the higher-order modes in the area of the concave convergent lens of the ZnO film. The guided optical waves that were SAW-Bragg deflected, mode selected, and lens focused were detected by the Schottky diode photodetector incorporated at the boundary between the ZnO film waveguide and the Si substrate