Title :
Integrated SAW-AO-deflector and photo-detector on Si
Author :
Shiosaki, Tadashi ; Kitamura, Naoki ; Kawabata, Akira
Author_Institution :
Dept. of Electr., Kyoto Univ., Japan
Abstract :
Described is the integration of a thin-film optical waveguide, a surface acoustic wave (SAW) guide, an acoustooptic Bragg deflector, a mode index lens, a mode filter, and two Schottky photodiodes on a Si substrate, where the piezoelectric, acoustic, optic, and acoustooptic properties of ZnO were used. A thin-film lens was fabricated by making use of a gradual film thickness change, the refractive index dispersion of the fundamental mode on the film thickness, and the mode cutoff property of the higher-order modes in the area of the concave convergent lens of the ZnO film. The guided optical waves that were SAW-Bragg deflected, mode selected, and lens focused were detected by the Schottky diode photodetector incorporated at the boundary between the ZnO film waveguide and the Si substrate
Keywords :
Schottky-barrier diodes; acousto-optical devices; integrated optoelectronics; lenses; optical deflectors; optical dispersion; optical films; optical filters; optical waveguides; photodetectors; photodiodes; piezoelectric thin films; refractive index; surface acoustic wave devices; zinc compounds; SAW guide; SAW-AO-deflector; Schottky photodiodes; Si; ZnO-Si; ZnO-SiO2-Si; acoustic properties; acoustooptic Bragg deflector; acoustooptic properties; concave convergent lens; diode photodetector; film thickness; fundamental mode; guided optical waves; integration; mode cutoff property; mode filter; mode index lens; optical properties; piezoelectric properties; refractive index dispersion; surface acoustic wave; thin-film lens; thin-film optical waveguide; wave deflection; Integrated optics; Lenses; Optical films; Optical filters; Optical refraction; Optical variables control; Optical waveguides; Piezoelectric films; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
DOI :
10.1109/ISAF.1990.200245