• DocumentCode
    3036085
  • Title

    Analysis of elastic properties of textured thin films

  • Author

    Akiniwa, Yoshiaki ; Machiya, Shutaro ; Serizawa, Kazufumi ; Tanaka, Keisuke

  • Author_Institution
    Dept. of Mech. Eng., Nagoya Univ., Japan
  • fYear
    2004
  • fDate
    31 Oct.-3 Nov. 2004
  • Firstpage
    75
  • Lastpage
    80
  • Abstract
    Finite element models of polycrystalline thin films were constructed based on the Monte Carlo method. The models consisted of columnar aggregates of cubic crystals with fiber texture whose axis was <001> direction perpendicular to the film surface. In the Monte Carlo method, the nucleus of a crystal was distributed at positions generated by the random number, and the crystal boundary was formed from the coordinates of the nucleus of crystals by using Voronoi tessellation. The number of grains in a sample volume was varied 10 to 1000, and fifty models with different orientations were produced for each case. A constant uniaxial displacement was applied to the models to examine the scatter of elastic properties of thin films under the conditions of plane strain and plane stress. The scatter and mean values of Young´s modulus and Poisson´s ratio were obtained as functions of the number of the grains within a sample volume. A method is proposed to determine the number of grains for thin films to have macroscopic properties for various thin films with different degrees of elastic anisotropy.
  • Keywords
    Monte Carlo methods; Poisson ratio; Young´s modulus; elastic deformation; elasticity; fibres; finite element analysis; grain boundaries; texture; thin films; Monte Carlo method; Poisson ratio; Voronoi tessellation; Young modulus; columnar aggregates; crystal boundary; elastic anisotropy; elastic properties; fiber texture; finite element models; macroscopic properties; plane strain; plane stress; polycrystalline thin films; textured thin films; uniaxial displacement; Aggregates; Anisotropic magnetoresistance; Crystals; Finite element methods; Random number generation; Scattering; Stress; Surface texture; Transistors; Uniaxial strain;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. Proceedings of the 2004 International Symposium on
  • Print_ISBN
    0-7803-8607-8
  • Type

    conf

  • DOI
    10.1109/MHS.2004.1421280
  • Filename
    1421280