X-ray lithography fabrication of large diffractive optical elements on a curve surface

Author

Li, Yigui ; Sugiyama, Susumu

Author_Institution

Res. Organ. of Sci. & Eng., Ritsumeikan Univ., Shiga, Japan

fYear

2004

fDate

31 Oct.-3 Nov. 2004

Firstpage

115

Lastpage

119

Abstract

We demonstrate experimentally the X-ray lithography technique to fabricate diffractive optical elements (DOE) on curved surfaces such as convex and concave lens (mirrors) with moving resist stage driven by a step motor. Some gratings with different pitches on the convex and concave lens surface are obtained. We believed that this technique can also transfer large area DOE patterns, with a continuous surface relief, onto a convex and concave lens (mirrors) surface.

Keywords

X-ray lithography; diffraction gratings; diffractive optical elements; lenses; mirrors; optical fabrication; resists; surface topography; X-ray lithography; concave lens; concave mirrors; convex lens; convex mirrors; diffractive optical elements; gratings; resist stage; step motor; surface relief; Lenses; Mirrors; Optical device fabrication; Optical diffraction; Optical interconnections; Particle beam optics; Resists; US Department of Energy; X-ray diffraction; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. Proceedings of the 2004 International Symposium on

Print_ISBN

0-7803-8607-8

Type

conf

DOI

10.1109/MHS.2004.1421287

Filename

1421287