Title :
A 192×108 pixel ToF-3D image sensor with single-tap concentric-gate demodulation pixels in 0.13 µm technology
Author :
Lee, T.Y. ; Lee, Y.J. ; Min, D.K. ; Lee, S.H. ; Kim, W.H. ; Kim, S.H. ; Jung, J.K. ; Ovsiannikov, I. ; Jin, Y.G. ; Park, Y.D. ; Fossum, E.R. ; Chung, C.H.
Author_Institution :
Semicond. R&D Center, Samsung Electron., Hwasung, South Korea
Abstract :
A single-tap concentric photogate pixel of 28 μm pitch is developed for application to time-of-flight (ToF) three dimension (3D) image sensors. The 198×108 ToF pixel array exhibits demodulation contrast higher than 50% and distance error less than 1%, over 1 to 7 m range using 20MHz modulation of 850 nm light emitting diode (LED) illumination.
Keywords :
image sensors; light emitting diodes; LED illumination; ToF pixel array; frequency 20 MHz; light emitting diode illumination; single-tap concentric-gate demodulation pixels; size 0.13 mum; time-of-flight three dimension image sensors; Arrays; Demodulation; Image sensors; Logic gates; Signal to noise ratio; Three dimensional displays;
Conference_Titel :
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4577-0506-9
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2011.6131517
