• DocumentCode
    3037046
  • Title

    Physical mechanisms of endurance degradation in TMO-RRAM

  • Author

    Chen, B. ; Lu, Y. ; Gao, B. ; Fu, Y.H. ; Zhang, F.F. ; Huang, P. ; Chen, Y.S. ; Liu, L.F. ; Liu, X.Y. ; Kang, J.F. ; Wang, Y.Y. ; Fang, Z. ; Yu, H.Y. ; Li, X. ; Wang, X.P. ; Singh, N. ; Lo, G.Q. ; Kwong, D.L.

  • Author_Institution
    Shenzhen Grad. Sch., Peking Univ., Shenzhen, China
  • fYear
    2011
  • fDate
    5-7 Dec. 2011
  • Abstract
    We report, for the first time, three types of endurance failure behaviors in TMO based RRAM. New physical mechanisms are proposed to clarify the physical origins of these endurance failures. A physically-based optimized switching mode is developed to improve the endurance of TMO-RRAM. A significantly enhanced endurance of >;109 switching cycles was demonstrated in the HfOx/TiOx/HfOx/TiOx devices.
  • Keywords
    hafnium compounds; random-access storage; titanium compounds; HfOx-TiOx-HfOx-TiOx; TMO based RRAM; endurance failure behaviors; physical mechanisms; physically-based optimized switching mode; resistive random access memory; transitional metal oxide; Degradation; Electrical resistance measurement; Hafnium compounds; Ions; Resistance; Switches; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2011 IEEE International
  • Conference_Location
    Washington, DC
  • ISSN
    0163-1918
  • Print_ISBN
    978-1-4577-0506-9
  • Electronic_ISBN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.2011.6131539
  • Filename
    6131539