A dual axis thermal convective silicon gyroscope

This paper presents the design, simulation and fabrication of a semiconductor gas gyroscope. The proposed sensor can detect dual axis of angular rate. The gyroscope configuration consists of two main parts, the piezoelectric pump and the micro sensing part, which consists of four thermistor wires with dimension of 400 × 4 × 2 μm³, (length × width × thickness). Good agreement between the sensitivity simulation results and the experimental data has been realized. This gas gyroscope is expected to be applied in ship anti-rolling and stabilization systems.