Title :
Innovative way of implementing active voltage contrast
Author :
Sabate, Andrew C. ; Ismail, Nur ; Nordin, Norani
Author_Institution :
Product Anal. Lab., ON Semicond. Malaysia, Seremban, Malaysia
Abstract :
Determining the failure mechanism of a failing unit is becoming more expensive due to the tools for fault isolation. This paper will discuss the low cost and innovative way to implement Active Voltage Contrast (AVC) imaging fault isolation tool using the existing Scanning Electron Microscopy (SEM).
Keywords :
failure analysis; scanning electron microscopy; test equipment; AVC imaging fault isolation tool; SEM; active voltage contrast; failing unit; failure mechanism; scanning electron microscopy; Abstracts; Batteries; Integrated circuits; X-ray imaging;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1241-4
DOI :
10.1109/IPFA.2013.6599140
