• DocumentCode
    3037187
  • Title

    Innovative way of implementing active voltage contrast

  • Author

    Sabate, Andrew C. ; Ismail, Nur ; Nordin, Norani

  • Author_Institution
    Product Anal. Lab., ON Semicond. Malaysia, Seremban, Malaysia
  • fYear
    2013
  • fDate
    15-19 July 2013
  • Firstpage
    132
  • Lastpage
    135
  • Abstract
    Determining the failure mechanism of a failing unit is becoming more expensive due to the tools for fault isolation. This paper will discuss the low cost and innovative way to implement Active Voltage Contrast (AVC) imaging fault isolation tool using the existing Scanning Electron Microscopy (SEM).
  • Keywords
    failure analysis; scanning electron microscopy; test equipment; AVC imaging fault isolation tool; SEM; active voltage contrast; failing unit; failure mechanism; scanning electron microscopy; Abstracts; Batteries; Integrated circuits; X-ray imaging;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
  • Conference_Location
    Suzhou
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4799-1241-4
  • Type

    conf

  • DOI
    10.1109/IPFA.2013.6599140
  • Filename
    6599140
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3037187