Title :
Bulk acoustic waves in multilayer structures
Author :
Cherednick, V.I. ; Dvoesherstov, M.Y.
Author_Institution :
Chem. Dept., Nizhny Novgorod State Univ., Nizhny Novgorod, Russia
Abstract :
A theoretical investigation of bulk acoustic waves in multilayer structures is presented. This investigation is based on a rigorous solution of wave equations with correct boundary conditions on all the layer surfaces. Obtained results give a possibility to calculate the film bulk acoustic wave resonators with arbitrary quantity of layers, including the resonators with Bragg reflector. A frequency response, a resonance frequency, a temperature coefficient of frequency and a spatial distribution of all the wave parameters are available for these calculations.
Keywords :
bulk acoustic wave devices; multilayers; surface acoustic wave resonators; wave equations; Bragg reflector; boundary conditions; bulk acoustic waves; film bulk acoustic wave resonators; frequency response; layer surfaces; multilayer structures; resonance frequency; temperature coefficient; theoretical investigation; wave equations; wave parameters; Acoustic waves; Electric potential; Electrodes; Equations; Mathematical model; Metals; Bragg reflector; bulk acoustic wave; resonator;
Conference_Titel :
Multimedia Technology (ICMT), 2011 International Conference on
Conference_Location :
Hangzhou
Print_ISBN :
978-1-61284-771-9
DOI :
10.1109/ICMT.2011.6002436
