Title :
Structure and property of ferroelectric PbTiO3 thin films by thermal decomposition of metallo-organic compounds
Author :
Ren, Wei ; Wu, Xiaoqing ; Zhang, Liangying ; Yao, Xi
Author_Institution :
Dept. of Electron. Eng., Xi´´an Jiaotong Univ., China
Abstract :
The structure and properties of ferroelectric PbTiO3 thin films prepared by thermal decomposition of metallo-organic compounds were studied. PbTiO3 thin films annealed from 514°C to 700°C have a perovskite structure. The dielectric constant was 120. The tangent of the loss angle was less than 0.05 at 1 kHz. The films showed high resistivity (about 1012 Ω-cm). Spontaneous polarization and remanent polarization were 10.59 μC/cm2 and 8.96 μC/cm2 respectively
Keywords :
annealing; dielectric losses; dielectric polarisation; electronic conduction in insulating thin films; ferroelectric thin films; lead compounds; permittivity; 1.0 kHz; 1012 ohmcm; 514 to 700 degC; PbTiO3; annealing; dielectric constant; ferroelectric thin films; loss angle tangent; metallo-organic compounds; perovskite structure; properties; remanent polarization; resistivity; spontaneous polarisation; structure; thermal decomposition; Dielectric measurements; Dielectric thin films; Ferroelectric materials; Lead; Spinning; Sputtering; Temperature; Thermal decomposition; Thin film circuits; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
DOI :
10.1109/ISAF.1990.200350
