Title :
PZT thin films by laser ablation
Author :
Lee, J. ; Ramkumar, K. ; Safari, A. ; Danforth, S.C. ; Neifeld, R. ; Pfeffer, R.L. ; Wrenn, C.
Author_Institution :
Dept. of Ceramic Eng., Rutgers Univ., Piscataway, NJ, USA
Abstract :
Lead zirconate titanate (PZT) thin films were deposited by laser ablation using both CO2 and excimer lasers. The films were deposited in a vacuum as well as in an oxygen ambient, and the compositions were analyzed by Rutherford backscattering spectrometry and energy dispersive spectroscopy. It was found that the CO2 laser which has a long pulselength yields films with excess Pb, whereas the excimer laser which has a characteristically shorter pulselength yields Pb deficient films
Keywords :
Rutherford backscattering; X-ray chemical analysis; ferroelectric thin films; lead compounds; vacuum deposited coatings; CO2 laser; O ambient; Pb deficient films; PbZrO3TiO3; RBS; Rutherford backscattering spectrometry; compositions; energy dispersive spectroscopy; excess Pb; excimer lasers; laser ablation; long pulselength; thin films; vacuum; Backscatter; Elementary particle vacuum; Laser ablation; Lead; Optical pulses; Pulsed laser deposition; Spectroscopy; Sputtering; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
DOI :
10.1109/ISAF.1990.200358
