DocumentCode :
3037916
Title :
Channel optical waveguides of ZnO thin films
Author :
Kamauchi, M. ; Shiosaki, T. ; Kawabata, A.
Author_Institution :
Mitsubishi Cable Industries Ltd., Hyogo, Japan
fYear :
1990
fDate :
6-8 Jun 1990
Firstpage :
733
Lastpage :
736
Abstract :
Addressed are the waveguide properties of Ti-diffused and strip-loaded ZnO thin films and fabrication of channel optical waveguides. Channel optical waveguides of ZnO films were obtained by Ti diffusing and SiO2 loading, respectively. The optical loss of the SiO2-loaded waveguide was superior to that of the Ti-diffused waveguide. In the SiO2-loaded type, the theoretical values showed good agreement with experimental values
Keywords :
dielectric-loaded waveguides; optical films; optical losses; optical waveguides; silicon compounds; titanium; zinc compounds; SiO2 loading; SiO2-ZnO:Ti; Ti-diffused films; channel optical waveguides; fabrication; optical loss; strip-loaded ZnO thin films; waveguide properties; Annealing; Equations; Optical films; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Refractive index; Temperature dependence; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
Type :
conf
DOI :
10.1109/ISAF.1990.200361
Filename :
200361
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3037916
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