Micromechanisms fabrication: a challenge in micromechanics and microelectronics

Micromechanisms fall into two broad categories: sensors and actuators. Actuators convert electric energy to mechanical energy, whereas sensors convert physical quantities such as force and pressure to electronic signals. The sensor area, in particular the resonating sensor, appears to have the earmarks of practical applications. These applications are not in just the traditional pressure-transducer area, but extend to new magnetic devices, humidity sensors, and gas-flow monitors. Micromechanical systems benefit from available microelectronic technologies if magnetic rather than electrostatic drives are used with reasonable-gap dimensions. It is noted that demonstration of a fully-fed-back system is only a few months away. Identified applications in magnetic recording, microsurgery, and precision positioning appear to provide, a healthy, economically viable future for this field.<>