• DocumentCode
    3038486
  • Title

    Sub-10 nm carbon nanotube transistor

  • Author

    Franklin, Aaron D. ; Han, Shu-Jen ; Tulevski, George S. ; Luisier, Mathieu ; Breslin, Chris M. ; Gignac, Lynne ; Lundstrom, Mark S. ; Haensch, Wilfried

  • Author_Institution
    T.J. Watson Res. Center, IBM Res., Yorktown Heights, NY, USA
  • fYear
    2011
  • fDate
    5-7 Dec. 2011
  • Abstract
    This first demonstration of CNT transistors with channel lengths down to 9 nm shows substantially better scaling behavior than theoretically expected. Numerical simulations suggest that a possible explanation for the surprisingly good performance is a result of the gate modulating both the charge in the channel and in the contact regions. The unprecedented performance should ignite exciting new research into improving the purity and placement of nanotubes, as well as optimizing CNT transistor structure and integration. Results from aggressively scaling these molecular-channel transistors exhibit their strong suitability for a low-voltage, high-performance logic technology.
  • Keywords
    carbon nanotubes; nanotube devices; transistors; CNT transistor integration; CNT transistor structure; carbon nanotube transistor; channel lengths; contact region; gate modulation; low-voltage high-performance logic technology; molecular-channel transistors; numerical simulations; scaling behavior; size 10 nm; Logic gates; Nanowires; Performance evaluation; Scanning electron microscopy; Silicon; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2011 IEEE International
  • Conference_Location
    Washington, DC
  • ISSN
    0163-1918
  • Print_ISBN
    978-1-4577-0506-9
  • Electronic_ISBN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.2011.6131600
  • Filename
    6131600