Title :
Sub-10 nm carbon nanotube transistor
Author :
Franklin, Aaron D. ; Han, Shu-Jen ; Tulevski, George S. ; Luisier, Mathieu ; Breslin, Chris M. ; Gignac, Lynne ; Lundstrom, Mark S. ; Haensch, Wilfried
Author_Institution :
T.J. Watson Res. Center, IBM Res., Yorktown Heights, NY, USA
Abstract :
This first demonstration of CNT transistors with channel lengths down to 9 nm shows substantially better scaling behavior than theoretically expected. Numerical simulations suggest that a possible explanation for the surprisingly good performance is a result of the gate modulating both the charge in the channel and in the contact regions. The unprecedented performance should ignite exciting new research into improving the purity and placement of nanotubes, as well as optimizing CNT transistor structure and integration. Results from aggressively scaling these molecular-channel transistors exhibit their strong suitability for a low-voltage, high-performance logic technology.
Keywords :
carbon nanotubes; nanotube devices; transistors; CNT transistor integration; CNT transistor structure; carbon nanotube transistor; channel lengths; contact region; gate modulation; low-voltage high-performance logic technology; molecular-channel transistors; numerical simulations; scaling behavior; size 10 nm; Logic gates; Nanowires; Performance evaluation; Scanning electron microscopy; Silicon; Transistors;
Conference_Titel :
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4577-0506-9
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2011.6131600