DocumentCode
3038689
Title
Design, modeling and optimization of a multilayer diaphragm used in optical pressure sensor
Author
Khosravi, Amin ; Khosravi, Mahdi ; Nozari, Parastoo
Author_Institution
Dept. of Electron. Eng., Arak Azad Univ., Arak, Iran
Volume
3
fYear
2012
fDate
25-27 May 2012
Firstpage
439
Lastpage
443
Abstract
Multilayer diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both optical sensor and common sensor. A simplified model is introduced to reduce the CPU time. Characteristics of the multilayer diaphragm have been investigated. The important parameters of the multilayer diaphragm have been optimized to improve the performance of a pressure sensor using APDL macro.
Keywords
diaphragms; finite element analysis; optical sensors; optimisation; pressure sensors; ANSYS implementation; APDL macro; CPU time reduction; finite element software; multilayer diaphragm; optical pressure sensor; optimization; Analytical models; Finite element methods; Micromechanical devices; Nonhomogeneous media; Numerical models; Optimization; Solids; ANSYS®; Finite Element; MEMS; Multilayer Diaphragm; optical Pressure Sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Computer Science and Automation Engineering (CSAE), 2012 IEEE International Conference on
Conference_Location
Zhangjiajie
Print_ISBN
978-1-4673-0088-9
Type
conf
DOI
10.1109/CSAE.2012.6272989
Filename
6272989
Link To Document