Title :
Inkjet-printed micro-electro-mechanical switches
Author :
Park, Eung Seok ; Chen, Yenhao ; Liu, Tsu-Jae King ; Subramanian, Vivek
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
Abstract :
An inkjet-printed micro-electro-mechanical switch technology is demonstrated to provide for zero off-state leakage, low on-state resistance (~10 Ω), and moderate switching delay (~10 μs), indicating promise for application to future large-area displays.
Keywords :
delay circuits; ink jet printing; leakage currents; microswitches; inkjet-printed switch; low on-state resistance; microelectromechanical switches; switching delay; zero off-state leakage; Delay; Electrodes; Ink; Logic gates; Optical switches; Voltage measurement;
Conference_Titel :
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4577-0506-9
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2011.6131636
