Author :
Arcamone, J. ; Niel, A. ; Gouttenoire, V. ; Petitjean, M. ; David, N. ; Barattin, R. ; Matheron, M. ; Ricoul, F. ; Bordy, T. ; Blanc, H. ; Ruellan, J. ; Mercier, D. ; Pereira-Rodrigues, N. ; Costa, G. ; Agache, V. ; Hentz, S. ; Gabriel, JC ; Baleras, F. ;
Abstract :
This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.
Keywords :
VLSI; chromatography; gas sensors; microfabrication; nanofabrication; nanosensors; silicon; NEMS detectors; NEMS resonators; VLSI silicon multigas analyzer coupling gas chromatography; microfabrication; nanoelectromechanical systems; nanofabrication; portable multigas analyzer; Detectors; Frequency measurement; Nanoelectromechanical systems; Noise; Noise measurement; Resonant frequency; Silicon;
