• DocumentCode
    3040415
  • Title

    Self-organization of highly ordered mosaic structure of porous silicon at long anodic etching of p-type silicon in the electrolyte with internal current source

  • Author

    Tynyshtykbaev, Kurbangali B.

  • Author_Institution
    Inst. of Phys. & Technol., Almaty, Kazakhstan
  • fYear
    2011
  • fDate
    26-28 July 2011
  • Firstpage
    6528
  • Lastpage
    6531
  • Abstract
    Self-organization of highly ordered mosaic structure of porous Si at long anodic etching of p-Si (100) in electrolyte with internal source of the current is observed. Sizes of the nanocrystallites islets of porous Si, the period of their location and self-organization of the mosaic structure of porous silicon are defined by the effect of forces of elastically-deformation, defect-deformation and capillary-fluctuation that exist at the interface of electrolyte/porous Si/c-Si/ in process of pores formation. Process of spontaneous formation of mosaic structure por-Si has place in results from relaxation of the elastically-strained layer of porous surface and effect of capillary-fluctuation forces. Conditions of development of these forces depend on the self-coordinated parameters of etching of interface heterophase of electrochemical system the electrolyte/porous Si/c-Si/ and parameters of electrodes and electrochemical cell.
  • Keywords
    anodisation; cells (electric); elastic deformation; electrodes; electrolytes; elemental semiconductors; etching; mosaic structure; porous semiconductors; self-assembly; silicon; Si; anodic etching; capillary fluctuation; defect deformation; elastic deformation; electrochemical cell; electrochemical system; electrolyte; highly ordered mosaic structure; interface heterophase; internal current source; nanocrystallite islets; p-type silicon; porous silicon; self-coordinated parameters; self-organization; Atomic layer deposition; Etching; Hafnium; Silicon; Surface cracks; Surface morphology; electrolyte; interface; mosaic structure; nanocrystallites; porous Si; self-organization; surface;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Multimedia Technology (ICMT), 2011 International Conference on
  • Conference_Location
    Hangzhou
  • Print_ISBN
    978-1-61284-771-9
  • Type

    conf

  • DOI
    10.1109/ICMT.2011.6002582
  • Filename
    6002582