Title :
CMOS-based biosensors with an independent double-gate FinFET
Author :
Ahn, Jae-Hyuk ; Kim, Jee-Yeon ; Jung, Cheulhee ; Moon, Dong-Il ; Choi, Sung-Jin ; Kim, Chang-Hoon ; Lee, Kyung-Bok ; Park, Hyun Gyu ; Choi, Yang-Kyu
Author_Institution :
EE, KAIST, Daejeon, South Korea
Abstract :
A novel biosensor based on an independent double-gate FinFET is demonstrated for the first time. It features a silicon nanowire implemented on a bulk substrate, a floating gate for charge sensing, and a control gate for current driving. The detection of charged polymers and DNA is demonstrated for the diagnosis of breast cancer.
Keywords :
CMOS integrated circuits; DNA; MOSFET; biomedical equipment; biomolecular electronics; biosensors; cancer; elemental semiconductors; molecular biophysics; nanosensors; nanowires; patient diagnosis; polymers; silicon; CMOS-based biosensors; DNA; Si; breast cancer diagnosis; charge sensing; charged polymers; independent double-gate FinFET; silicon nanowire; Biosensors; DNA; FinFETs; Logic gates; Silicon; Substrates; Threshold voltage;
Conference_Titel :
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4577-0506-9
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2011.6131683
