DocumentCode
3040441
Title
CMOS-based biosensors with an independent double-gate FinFET
Author
Ahn, Jae-Hyuk ; Kim, Jee-Yeon ; Jung, Cheulhee ; Moon, Dong-Il ; Choi, Sung-Jin ; Kim, Chang-Hoon ; Lee, Kyung-Bok ; Park, Hyun Gyu ; Choi, Yang-Kyu
Author_Institution
EE, KAIST, Daejeon, South Korea
fYear
2011
fDate
5-7 Dec. 2011
Abstract
A novel biosensor based on an independent double-gate FinFET is demonstrated for the first time. It features a silicon nanowire implemented on a bulk substrate, a floating gate for charge sensing, and a control gate for current driving. The detection of charged polymers and DNA is demonstrated for the diagnosis of breast cancer.
Keywords
CMOS integrated circuits; DNA; MOSFET; biomedical equipment; biomolecular electronics; biosensors; cancer; elemental semiconductors; molecular biophysics; nanosensors; nanowires; patient diagnosis; polymers; silicon; CMOS-based biosensors; DNA; Si; breast cancer diagnosis; charge sensing; charged polymers; independent double-gate FinFET; silicon nanowire; Biosensors; DNA; FinFETs; Logic gates; Silicon; Substrates; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location
Washington, DC
ISSN
0163-1918
Print_ISBN
978-1-4577-0506-9
Electronic_ISBN
0163-1918
Type
conf
DOI
10.1109/IEDM.2011.6131683
Filename
6131683
Link To Document