Title :
Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.99CH36301)
Abstract :
The following topics were dealt with: microelectronics development university programs; semiconductor devices; university-industrial partnerships; device processing issues; university curriculum development; modelling and simulation; MEMS
Keywords :
electric sensing devices; field effect transistors; integrated circuit manufacture; integrated circuit modelling; micromechanical devices; semiconductor process modelling; MEMS; device processing; microelectronics; modelling; semiconductor devices; simulation;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location :
Minneapolis, MN, USA
Print_ISBN :
0-7803-5240-8
DOI :
10.1109/UGIM.1999.782809