• DocumentCode
    3040994
  • Title

    Cross-sensitivity of humidity sensor layers based on organic materials

  • Author

    Dzugan, Tomas ; Hamacek, Ales ; Reboun, Jan ; Hromadka, Karel ; Vik, Robert

  • Author_Institution
    Dept. of Technol. & Meas./RICE, Univ. of West Bohemia in Pilsen, Pilsen, Czech Republic
  • fYear
    2012
  • fDate
    9-13 May 2012
  • Firstpage
    37
  • Lastpage
    40
  • Abstract
    This article deals with the research of an impact of various gases and vapours on electrical parameters of phthalocyanine. Cross-sensitivity was researched in order to exclude a negative impact of organic vapours on humidity sensor. Thin layer of phthalocyanine was exposed to various vapours, and then responses of its electrical characteristics were measured. This suitable material for humidity sensors, was deposited from the liquid phase on a substrate with interdigital electrodes and than exposed to the effect of analytes. Subsequently, the impedance characteristic of this thin film layer was measured. The comparison of responses to various gases and vapours is discussed in more detail as well.
  • Keywords
    electrodes; humidity sensors; organic compounds; sensitivity; electrical parameter; humidity sensor layer cross sensitivity; interdigital electrode; organic materials; organic vapour; phthalocyanine; Atomic layer deposition; Conductivity; Electrodes; Humidity; Impedance; Organic materials; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Technology (ISSE), 2012 35th International Spring Seminar on
  • Conference_Location
    Bad Aussee
  • ISSN
    2161-2528
  • Print_ISBN
    978-1-4673-2241-6
  • Electronic_ISBN
    2161-2528
  • Type

    conf

  • DOI
    10.1109/ISSE.2012.6273104
  • Filename
    6273104