DocumentCode
3040994
Title
Cross-sensitivity of humidity sensor layers based on organic materials
Author
Dzugan, Tomas ; Hamacek, Ales ; Reboun, Jan ; Hromadka, Karel ; Vik, Robert
Author_Institution
Dept. of Technol. & Meas./RICE, Univ. of West Bohemia in Pilsen, Pilsen, Czech Republic
fYear
2012
fDate
9-13 May 2012
Firstpage
37
Lastpage
40
Abstract
This article deals with the research of an impact of various gases and vapours on electrical parameters of phthalocyanine. Cross-sensitivity was researched in order to exclude a negative impact of organic vapours on humidity sensor. Thin layer of phthalocyanine was exposed to various vapours, and then responses of its electrical characteristics were measured. This suitable material for humidity sensors, was deposited from the liquid phase on a substrate with interdigital electrodes and than exposed to the effect of analytes. Subsequently, the impedance characteristic of this thin film layer was measured. The comparison of responses to various gases and vapours is discussed in more detail as well.
Keywords
electrodes; humidity sensors; organic compounds; sensitivity; electrical parameter; humidity sensor layer cross sensitivity; interdigital electrode; organic materials; organic vapour; phthalocyanine; Atomic layer deposition; Conductivity; Electrodes; Humidity; Impedance; Organic materials; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology (ISSE), 2012 35th International Spring Seminar on
Conference_Location
Bad Aussee
ISSN
2161-2528
Print_ISBN
978-1-4673-2241-6
Electronic_ISBN
2161-2528
Type
conf
DOI
10.1109/ISSE.2012.6273104
Filename
6273104
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