Novel galvanic isolation based on spin valve GMR magnetic field sensors

Author

Fayfield, Robert ; Hazelton, Tim ; Popple, Tony ; Williamson, Fred

Author_Institution

Nonvolatile Electron. Inc., MN, USA

fYear

1999

fDate

1999

Firstpage

165

Lastpage

169

Abstract

A novel technology for integrated galvanic signal isolation is presented. The new approach combines MEMS derived thick film metallization and polymer processing technology with spin valve giant magnetoresistive (GMR) materials on a silicon substrate to yield a tiny, high performance signal isolator. This isolator device represents a unit cell that can be fabricated in single or multiple channel versions and can be monolithically integrated with standard silicon ICs. This will allow the realization of high-level isolated interface functions in low cost, small footprint, low profile packages

Keywords

integrated circuit metallisation; integrated circuit packaging; isolation technology; magnetic sensors; micromechanical devices; spin valves; MEMS; giant magnetoresistive materials; high performance signal isolator; integrated galvanic signal isolation; isolated interface functions; low cost packages; magnetic field sensors; multiple channel version; polymer processing technology; silicon substrate; single channel version; spin valve; thick film metallization; Galvanizing; Giant magnetoresistance; Isolation technology; Isolators; Magnetic fields; Magnetic materials; Micromechanical devices; Silicon; Spin valves; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial

Conference_Location

Minneapolis, MN

Print_ISBN

0-7803-5240-8

Type

conf

DOI

10.1109/UGIM.1999.782846

Filename

782846