Title :
LTCC membranes With integrated heating structures, temperature sensors and strain gauges
Author :
Gutzeit, Nam ; Müller, Jens ; Reinlein, Claudia ; Gebhardt, Sylvia
Author_Institution :
Inst. of Micro- & Nanotechnol., Ilmenau Univ. of Technol., Ilmenau, Germany
Abstract :
In this paper the challenging manufacturing process of a deformable mirror for the wave front correction of a high energy laser is described. During this process the LTCC membrane as the base component with integrated sensors must endure several postfire processes at temperatures of up to 900°C without any degradation of the sensors´ characteristics. In order to optimize the sensors, various combinations of resistor and conductor pastes and different geometries are characterized. The usability and the performance of the sensor elements after temperature treatment are investigated by measuring the resistance and its resistance temperature characteristic.
Keywords :
ceramic packaging; conductors (electric); electric resistance measurement; laser mirrors; manufacturing processes; membranes; resistors; strain gauges; temperature measurement; temperature sensors; LTCC membrane; conductor paste; deformable mirror; geometry; high energy laser; integrated heating structure; integrated sensor; manufacturing process; postfire processing; resistance measurement; resistance temperature characteristic; resistor; strain gauge; temperature sensor; temperature treatment; wave front correction; Conductivity; Geometry; Heating; Mirrors; Resistance; Temperature measurement; Temperature sensors;
Conference_Titel :
Electronics Technology (ISSE), 2012 35th International Spring Seminar on
Conference_Location :
Bad Aussee
Print_ISBN :
978-1-4673-2241-6
Electronic_ISBN :
2161-2528
DOI :
10.1109/ISSE.2012.6273169
