Development of Calibration Standards for the Optical Measurement of In-Plane Displacements of Micromechanical Components

Author

Gaspar, J. ; Held, J. ; Pedrini, G. ; Osten, W. ; Paul, O.

Author_Institution

Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

7

Lastpage

10

Abstract

The goal of this work is to develop miniaturized reference standards for the optical measurement of inplane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based inplane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured by means of optical techniques such as stroboscopic illumination, laser-deflection method and digital speckle interferometry.

Keywords

calibration; displacement measurement; electrostatic actuators; measurement by laser beam; silicon-on-insulator; speckle; stroboscopes; SOI; calibration; digital speckle interferometry; electrostatic actuation; in-plane displacements; in-plane microactuators; laser-deflection method; mechanical actuation; micromechanical components; optical measurement; stroboscopic illumination; Adaptive optics; Calibration; Displacement measurement; Electrostatic measurements; Measurement standards; Micromechanical devices; Optical devices; Optical interferometry; Production systems; Standards development;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805305

Filename

4805305