Title :
A Novel Stress-Gradient-Robust Metal-Contact Switch
Author :
Sedaghat-Pisheh, Hojr ; Kim, Jung-Mu ; Rebeiz, Gabriel M.
Author_Institution :
Univ. of California, San Diego, CA
Abstract :
This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS switch with low sensitivity to stress gradients and temperature variations. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and has excellent microwave performance to > 40 GHz.
Keywords :
microswitches; circular geometry; fast switching time; metal-contact RF MEMS switch; Contacts; Force measurement; Frequency measurement; Mechanical variables measurement; Q measurement; Springs; Stress measurement; Switches; Thickness measurement; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805310
