Finite Element Modelling of Flexural Plate Devices

Author

Matthews, G.I. ; Ippolito, S.J. ; Kalantar-zadeh, K. ; Wlodarski, W. ; Holland, A.

Author_Institution

Sch. of Electr. & Comput. Eng., R. Melbourne Inst. of Technol., Vic.

fYear

2004

fDate

8-10 Dec. 2004

Firstpage

145

Lastpage

148

Abstract

A two dimensional finite element model has been developed for the simulation of a layered flexural plate wave device using the ANSYS package. The simulated device consists of a 2.0 μm silicon nitride thin film, followed by a 0.4 μm aluminum ground layer. A 0.6 μm zinc oxide piezoelectric layer was defined to excite acoustic waves. Good agreement of device frequency response and displacement profiles have been achieved in comparison with other numerical simulation methods. In this paper, the finite element (FE) method is proposed as a benchmark for an alternative analysis based upon a Green´s function method. Furthermore, the FE method can be used to obtain other device parameters, such as insertion loss and charge density, which are presented

Keywords

Green´s function methods; acoustic transducers; finite element analysis; optical films; optical losses; optical sensors; piezoelectric materials; silicon compounds; zinc compounds; 0.6 mum; 2.0 mum; ANSYS; Al; Green function method; SiN; aluminum ground layer; charge density; finite element modelling; flexural plate devices; insertion loss; silicon nitride thin film; Acoustic waves; Aluminum; Finite element methods; Frequency response; Packaging; Piezoelectric films; Semiconductor thin films; Silicon; Thin film devices; Zinc oxide; ANSYS; Finite Element; Flexural Plate Waves; Lamb;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on

Conference_Location

Brisbane, Qld.

Print_ISBN

0-7803-8820-8

Type

conf

DOI

10.1109/COMMAD.2004.1577513

Filename

1577513