Title :
Porous Silicon Based Rugate Filters
Author :
Ilyas, S. ; Reece, P.J. ; Salvador, G.P. ; Booking, T. ; Gal, M.
Author_Institution :
Univ. of New South Wales, Sydney, NSW
Abstract :
We report on the design and fabrication of porous silicon based rugate filters. We have achieved very narrow linewidth, high reflectivity optical filters made entirely from silicon by continuously varying of the refractive index of Si and apodizing the index profile of the structure
Keywords :
elemental semiconductors; optical design techniques; optical fabrication; optical filters; porous semiconductors; refractive index; silicon; Si; design; fabrication; index profile apodization; narrow linewidth; porous silicon; reflectivity; refractive index; rugate filters; Displays; Optical device fabrication; Optical films; Optical filters; Optical refraction; Optical sensors; Reflectivity; Refractive index; Silicon; Sputtering; optical filter; porous silicon; rugate filter;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on
Conference_Location :
Brisbane, Qld.
Print_ISBN :
0-7803-8820-8
DOI :
10.1109/COMMAD.2004.1577519
