Title :
Performance analysis of automated interbay material handling and storage systems for large wafer fab
Author :
Carderelli, G. ; Pelagagge, Pacifico Marcello ; Granito, Agostino
Author_Institution :
Fac. of Eng., Univ. of L´´Aquila, Italy
Abstract :
In this paper the performances of an automated interbay material handling and storage system have been analyzed considering the effects of design choices, production planning and scheduling, system management and operator behaviour. The results point out the great importance of an appropriate design of the storage capacity distribution along the wafer fab
Keywords :
MOS integrated circuits; VLSI; integrated circuit manufacture; materials handling; production control; automated interbay system; design choices; large wafer fab; material handling; operator behaviour; production planning; production scheduling; storage capacity distribution; storage systems; system management; Design engineering; Engineering management; Instruments; Joining processes; Material storage; Materials handling; Performance analysis; Production planning; Storage automation; Vehicles;
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1994. Low-Cost Manufacturing Technologies for Tomorrow's Global Economy. Proceedings 1994 IEMT Symposium., Sixteenth IEEE/CPMT International
Conference_Location :
La Jolla, CA
Print_ISBN :
0-7803-2037-9
DOI :
10.1109/IEMT.1994.404712
