Title :
Accuracy Limitations Introduced by Digital Projection Sources in Profilometric Optical Metrology Systems
Author :
Baker, M.J. ; Chicharo, J. ; Jiangtao Xi ; Enbang Li
Author_Institution :
Sch. of Electr., Comput. & Telecommun. Eng., Wollongong Univ., NSW
Abstract :
The accuracy of profilometric optical metrology systems utilising digital fringe projection (DFP) is analysed. An analytical model to describe theoretical accuracy limitation is derived and given as a function of object distance from the projector, projector resolution, projection angle and also object gradient. Associated limitations of the model are also discussed and analysed. The validity of the new model is demonstrated through practical experimentation
Keywords :
optical projectors; optical sensors; surface topography measurement; accuracy limitations; digital fringe projection; object distance; object gradient; optical metrology systems; profilometric sensing; profilometric systems; projection angle; projector resolution; Analytical models; Biomedical optical imaging; Gratings; Metrology; Optical computing; Optical distortion; Optical interferometry; Optical sensors; Space technology; Telecommunication computing;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on
Conference_Location :
Brisbane, Qld.
Print_ISBN :
0-7803-8820-8
DOI :
10.1109/COMMAD.2004.1577540
