Development of an Optically Transparent Silicon Based Technology Platform for Biological Analysis

A prototype optical structure suitable for advanced biological investigation has been successfully manufactured using plasma-enhanced chemical vapor deposition and deep reactive-ion etching techniques. Our approach to the design and fabrication of the structure is such that it can easily be integrated onto a lab-on-a-chip cell positioning platform, combining the use of integrated circuit technology with optimal in situ analysis of cells through the substrate using high-resolution inverted microscope systems. This paper describes the concept, design, fabrication, and optical characterization of a transparent window and corresponding via, which extends from the top surface to bottom surface of a silicon wafer. The effectiveness of the platform is demonstrated in multicolor fluorescence imaging of cells, cultured on-chip, using an inverted, confocal microscope.