DocumentCode

3044345

Title

Chemical Beam Etching With Monolayer Control

Author

Tsang, W.T. ; Kapre, R.M. ; Chiu, T.H. ; Williams, M.D. ; Ferguson, J.F.

Author_Institution

AT&T Bell

fYear

1994

fDate

6-13 Jul 1994

Keywords

Chemicals; Etching; Gallium arsenide; Indium phosphide; Monitoring; Morphology;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:

Print_ISBN

0-7803-1752-1

Type

conf

DOI

10.1109/LEOSST.1994.700538

Filename

700538