Title :
High voltage electrostatic driving of MEMS micromirrors
Author :
Singh, Ravinder Pal ; Langer, Tal ; Je, Minkyu
Author_Institution :
Integrated Circuits & Syst. Lab., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
High Voltage pulses are required to actuate the MEMS for obtaining the desired performance. Charge pump based circuits are used for obtaining the required high-voltage conversion. However, many such stages need to be connected in series for achieving the required voltage gain. Thus, a two-stage boost converter is used to achieve 3.3V to 80V conversion. The PWM controllers are designed in 0.18 μm CMOS process. The pair of nMOS are used to generate the required MEMS actuation pulses.
Keywords :
charge pump circuits; electrostatics; micromirrors; CMOS process; MEMS micromirrors; PWM controllers; charge pump based circuits; high voltage electrostatic driving; high-voltage conversion; size 0.18 mum; voltage 3.3 V; voltage 80 V; Charge pumps; Inductors; Integrated circuits; Logic gates; Micromechanical devices; Pulse width modulation; Voltage control;
Conference_Titel :
Integrated Circuits (ISIC), 2011 13th International Symposium on
Conference_Location :
Singapore
Print_ISBN :
978-1-61284-863-1
DOI :
10.1109/ISICir.2011.6131900
