DocumentCode
3044358
Title
High voltage electrostatic driving of MEMS micromirrors
Author
Singh, Ravinder Pal ; Langer, Tal ; Je, Minkyu
Author_Institution
Integrated Circuits & Syst. Lab., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear
2011
fDate
12-14 Dec. 2011
Firstpage
152
Lastpage
155
Abstract
High Voltage pulses are required to actuate the MEMS for obtaining the desired performance. Charge pump based circuits are used for obtaining the required high-voltage conversion. However, many such stages need to be connected in series for achieving the required voltage gain. Thus, a two-stage boost converter is used to achieve 3.3V to 80V conversion. The PWM controllers are designed in 0.18 μm CMOS process. The pair of nMOS are used to generate the required MEMS actuation pulses.
Keywords
charge pump circuits; electrostatics; micromirrors; CMOS process; MEMS micromirrors; PWM controllers; charge pump based circuits; high voltage electrostatic driving; high-voltage conversion; size 0.18 mum; voltage 3.3 V; voltage 80 V; Charge pumps; Inductors; Integrated circuits; Logic gates; Micromechanical devices; Pulse width modulation; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Circuits (ISIC), 2011 13th International Symposium on
Conference_Location
Singapore
Print_ISBN
978-1-61284-863-1
Type
conf
DOI
10.1109/ISICir.2011.6131900
Filename
6131900
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