Title :
Measuremeni Of Sidewall Roughness Of InP Etched By RIBE
Author :
Matsutani, Akihiro ; Koyama, Fumio ; Iga, Kenichi
Author_Institution :
Tokyo Institute of Technology
Keywords :
Electrons; Etching; Indium phosphide; Rough surfaces; Surface roughness; Voltage;
Conference_Titel :
Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:
Print_ISBN :
0-7803-1752-1
DOI :
10.1109/LEOSST.1994.700540
