• DocumentCode
    3044504
  • Title

    Advanced Structures For Integrated Optics Realized With Shadow Masked Growth

  • Author

    Blondell, J. ; Moerman, I. ; de Dobbelaere, P. ; Van Daele, P. ; Demeester, P.

  • Author_Institution
    IMEC
  • fYear
    1994
  • fDate
    6-13 Jul 1994
  • Keywords
    Integrated optics; Lenses; Optical refraction; Optical surface waves; Optical waveguides; Photonic band gap; Production; Silicon; Substrates; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:
  • Print_ISBN
    0-7803-1752-1
  • Type

    conf

  • DOI
    10.1109/LEOSST.1994.700541
  • Filename
    700541