3044504

Advanced Structures For Integrated Optics Realized With Shadow Masked Growth

Blondell, J. ; Moerman, I. ; de Dobbelaere, P. ; Van Daele, P. ; Demeester, P.

IMEC

1994

6-13 Jul 1994

Integrated optics; Lenses; Optical refraction; Optical surface waves; Optical waveguides; Photonic band gap; Production; Silicon; Substrates; Wet etching;

English

ieee

Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:

0-7803-1752-1

conf

10.1109/LEOSST.1994.700541

700541