DocumentCode
3044643
Title
The MBE Growth And MCP/RIE-based Fabrication Of InGaAs-GaAs MQW Structures For 1047 - 1064 nm S-SEED Arrays
Author
Stanley, C.R. ; Pottier, F. ; Wilkinson, C.D.W.
Author_Institution
University of Glasgow
fYear
1994
fDate
6-13 Jul 1994
Keywords
Absorption; Etching; Fabrication; Gallium arsenide; Gold; Logic arrays; Molecular beam epitaxial growth; Quantum well devices; Semiconductor laser arrays; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:
Print_ISBN
0-7803-1752-1
Type
conf
DOI
10.1109/LEOSST.1994.700551
Filename
700551
Link To Document