Title :
A Low-Cost Flexible Hot-Film Sensor System for Flow Sensing and its Application to Aircraft
Author :
Zhu, R. ; Liu, P. ; Liu, X.D. ; Zhang, F.X. ; Zhou, Z.Y.
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
Abstract :
This paper reports a simple, low-cost preparation method for fabricating a thin hot-film flow sensing system directly on a flexible polyimide Printed Circuit Board (PCB) by incorporating printed circuit technique with micromachining process. The sensor system takes merits of simple structure, low cost, easy fabrication and packaging, integrating sensors with processing circuits, good mechanical property and sensing capability. The paper also demonstrates a novel application of the sensor system to a micro aerial vehicle (MAV). The wing tunnel experiments are conducted to validate the effectiveness of the sensors and the MAV.
Keywords :
avionics; flexible electronics; microfluidics; micromachining; printed circuit manufacture; flexible hot-film sensor system; flow sensing; micro aerial vehicle; micromachining process; printed circuit board; wing tunnel; Aircraft; Costs; Fabrication; Flexible printed circuits; Mechanical factors; Mechanical sensors; Micromachining; Packaging; Polyimides; Sensor systems;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805435