DocumentCode :
3044667
Title :
A Low-Cost Flexible Hot-Film Sensor System for Flow Sensing and its Application to Aircraft
Author :
Zhu, R. ; Liu, P. ; Liu, X.D. ; Zhang, F.X. ; Zhou, Z.Y.
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
fYear :
2009
fDate :
25-29 Jan. 2009
Firstpage :
527
Lastpage :
530
Abstract :
This paper reports a simple, low-cost preparation method for fabricating a thin hot-film flow sensing system directly on a flexible polyimide Printed Circuit Board (PCB) by incorporating printed circuit technique with micromachining process. The sensor system takes merits of simple structure, low cost, easy fabrication and packaging, integrating sensors with processing circuits, good mechanical property and sensing capability. The paper also demonstrates a novel application of the sensor system to a micro aerial vehicle (MAV). The wing tunnel experiments are conducted to validate the effectiveness of the sensors and the MAV.
Keywords :
avionics; flexible electronics; microfluidics; micromachining; printed circuit manufacture; flexible hot-film sensor system; flow sensing; micro aerial vehicle; micromachining process; printed circuit board; wing tunnel; Aircraft; Costs; Fabrication; Flexible printed circuits; Mechanical factors; Mechanical sensors; Micromachining; Packaging; Polyimides; Sensor systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
ISSN :
1084-6999
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2009.4805435
Filename :
4805435
Link To Document :
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