• DocumentCode
    3044667
  • Title

    A Low-Cost Flexible Hot-Film Sensor System for Flow Sensing and its Application to Aircraft

  • Author

    Zhu, R. ; Liu, P. ; Liu, X.D. ; Zhang, F.X. ; Zhou, Z.Y.

  • Author_Institution
    Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
  • fYear
    2009
  • fDate
    25-29 Jan. 2009
  • Firstpage
    527
  • Lastpage
    530
  • Abstract
    This paper reports a simple, low-cost preparation method for fabricating a thin hot-film flow sensing system directly on a flexible polyimide Printed Circuit Board (PCB) by incorporating printed circuit technique with micromachining process. The sensor system takes merits of simple structure, low cost, easy fabrication and packaging, integrating sensors with processing circuits, good mechanical property and sensing capability. The paper also demonstrates a novel application of the sensor system to a micro aerial vehicle (MAV). The wing tunnel experiments are conducted to validate the effectiveness of the sensors and the MAV.
  • Keywords
    avionics; flexible electronics; microfluidics; micromachining; printed circuit manufacture; flexible hot-film sensor system; flow sensing; micro aerial vehicle; micromachining process; printed circuit board; wing tunnel; Aircraft; Costs; Fabrication; Flexible printed circuits; Mechanical factors; Mechanical sensors; Micromachining; Packaging; Polyimides; Sensor systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
  • Conference_Location
    Sorrento
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-2977-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2009.4805435
  • Filename
    4805435