DocumentCode
3044667
Title
A Low-Cost Flexible Hot-Film Sensor System for Flow Sensing and its Application to Aircraft
Author
Zhu, R. ; Liu, P. ; Liu, X.D. ; Zhang, F.X. ; Zhou, Z.Y.
Author_Institution
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
527
Lastpage
530
Abstract
This paper reports a simple, low-cost preparation method for fabricating a thin hot-film flow sensing system directly on a flexible polyimide Printed Circuit Board (PCB) by incorporating printed circuit technique with micromachining process. The sensor system takes merits of simple structure, low cost, easy fabrication and packaging, integrating sensors with processing circuits, good mechanical property and sensing capability. The paper also demonstrates a novel application of the sensor system to a micro aerial vehicle (MAV). The wing tunnel experiments are conducted to validate the effectiveness of the sensors and the MAV.
Keywords
avionics; flexible electronics; microfluidics; micromachining; printed circuit manufacture; flexible hot-film sensor system; flow sensing; micro aerial vehicle; micromachining process; printed circuit board; wing tunnel; Aircraft; Costs; Fabrication; Flexible printed circuits; Mechanical factors; Mechanical sensors; Micromachining; Packaging; Polyimides; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805435
Filename
4805435
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