Considerations For The Design, Production, And Application Of Metal-organic Precursors In Optoelectronic Material Growth

Author

Bohling, D.A. ; Muhr, G.T. ; Jones, A.C. ; Smith, L.M.

Author_Institution

Air Products and Chemicals Inc.

fYear

1994

fDate

6-13 Jul 1994

Keywords

Chemical analysis; Chemical products; Epitaxial growth; Epitaxial layers; Inorganic materials; Production;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:

Print_ISBN

0-7803-1752-1

Type

DOI

10.1109/LEOSST.1994.700554

Filename

700554

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