Title :
Thermal Characterization of Microliter Amounts of Liquids by a Micromachined Calorimetric Transducer
Author :
Pärr, C. ; Santagata-Iervolino, E. ; van Herwaarden, A.W. ; Wien, W. ; Vellekoop, M.J.
Author_Institution :
Xensor Integration, Delfgauw
Abstract :
We show a simple method of measuring thermal conductivity and thermal diffusivity of liquids. For this we used stacked liquid calorimeter chips fabricated with thin film membranes for optimum thermal isolation of the sample under test. DC joule heating allows measurement of conductivity, AC joule heating allows measurement of diffusivity. We measured the response for iso-propanol (IPA), methanol and water, and water with IPA, methanol and sugar, and the measurement results compare well with the conductivity values. Diffusivity could also be measured.
Keywords :
calorimetry; membranes; micromachining; microsensors; organic compounds; thermal conductivity measurement; thermal diffusivity; thin film sensors; AC Joule heating; DC Joule heating; iso-propanol; methanol; micromachined calorimetric transducer; stacked liquid calorimeter chip; thermal characterization; thermal conductivity measurement; thermal diffusivity measurement; thermal isolation; thin film membrane; Biomembranes; Conductivity measurement; Heating; Liquids; Methanol; Semiconductor device measurement; Testing; Thermal conductivity; Transducers; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805437
