Double regulated voltage supply for high precision MEMS accelerometers

Author

Lim, Huey Jen ; Singh, Ravinder Pal ; Chuan, Kevin Chai Tshun ; Nuttman, David ; Je, Minkyu

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2011

fDate

12-14 Dec. 2011

Firstpage

571

Lastpage

574

Abstract

This work presents the power management block using a double regulated voltage supply design in order to meet the stringent requirement for high precision MEMS accelerometers ASIC. The architecture employs two stages of supply regulation using two bandgap circuits and two voltage regulators to achieve high PSRR (>;100dB) and high line regulation (10μV/V) which are required for the ASIC to achieve high linearity and high dynamic range. The design is implemented in 6M1P TowerSemi 0.18μm CMOS process.

Keywords

CMOS integrated circuits; accelerometers; application specific integrated circuits; detector circuits; microsensors; power supply circuits; voltage regulators; ASIC; CMOS process; bandgap circuit; double regulated voltage supply; high precision MEMS accelerometers; size 0.18 mum; Accelerometers; Application specific integrated circuits; Integrated circuit modeling; Micromechanical devices; Photonic band gap; Regulators; Voltage control; Low drop-out regulator (LDO); bandgap voltage reference; power-supply rejection ratio (PSRR);

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Circuits (ISIC), 2011 13th International Symposium on

Conference_Location

Singapore

Print_ISBN

978-1-61284-863-1

Type

conf

DOI

10.1109/ISICir.2011.6131927

Filename

6131927