Title :
Planar MEMS Supercapacitor using Carbon Nanotube Forests
Author :
Jiang, Y.Q. ; Zhou, Q. ; Lin, L.
Author_Institution :
Mech. Eng. Dept., Univ. of California, Berkeley, CA
Abstract :
Planar micro supercapacitors utilizing vertically aligned carbon nanotube (CNT) forests with the design of interdigital electrodes have been demonstrated. Conductive substrates using Mo/Al/Fe metal stack shows best CNT forest synthesis results with high electrical conductivity and dense CNT structures. Prototype devices show measured specific capacitances about 1000 times higher than those with plain metal electrodes without CNT forests. Furthermore, charging/discharging experiments show over 92% efficiency and very robust cycling stability. As such, we believe these planar MEMS supercapacitors could be applicable in various systems including energy harvesters, pulse-power supplies and advanced microelectronics as on-chip capacitors.
Keywords :
carbon nanotubes; micromechanical devices; supercapacitors; CNT structures; advanced microelectronics; carbon nanotube forest synthesis; conductive substrates; energy harvesters; interdigital electrodes; metal stack; microelectromechanical system; on-chip capacitors; plain metal electrodes; planar MEMS supercapacitor; planar micro supercapacitors; pulse-power supplies; robust cycling stability; Capacitance measurement; Carbon nanotubes; Conductivity; Electrodes; Iron; Microelectronics; Micromechanical devices; Prototypes; Robust stability; Supercapacitors;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805450
