Title :
Design of Power-Optimized Thermal Cantilevers for Scanning Probe Topography Sensing
Author :
Rothuizen, H. ; Despont, M. ; Drechsler, U. ; Hagleitner, C. ; Sebastian, A. ; Wiesmann, D.
Author_Institution :
Zurich Res. Lab., IBM Res., Ruschlikon
Abstract :
This paper reports on design optimization of cantilever-based thermal topography sensors using finite-element simulations, their fabrication and characterization. Measurements demonstrate vertical distance sensitivities DeltaR/R of 2times10-4 nm-1, yielding sub-angstrom resolution at bandwidths of several tens of kHz and at powers on the order of 1 mW.
Keywords :
finite element analysis; microsensors; cantilever-based thermal topography sensors; finite element simulations; power 1 mW; power-optimized thermal cantilevers; scanning probe topography sensing; sub-angstrom resolution; vertical distance sensitivities; Bandwidth; Biomembranes; Design optimization; Etching; Heating; Probes; Sensor phenomena and characterization; Silicon; Surfaces; Thermal sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805454
