DocumentCode
3045033
Title
Design of Power-Optimized Thermal Cantilevers for Scanning Probe Topography Sensing
Author
Rothuizen, H. ; Despont, M. ; Drechsler, U. ; Hagleitner, C. ; Sebastian, A. ; Wiesmann, D.
Author_Institution
Zurich Res. Lab., IBM Res., Ruschlikon
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
603
Lastpage
606
Abstract
This paper reports on design optimization of cantilever-based thermal topography sensors using finite-element simulations, their fabrication and characterization. Measurements demonstrate vertical distance sensitivities DeltaR/R of 2times10-4 nm-1, yielding sub-angstrom resolution at bandwidths of several tens of kHz and at powers on the order of 1 mW.
Keywords
finite element analysis; microsensors; cantilever-based thermal topography sensors; finite element simulations; power 1 mW; power-optimized thermal cantilevers; scanning probe topography sensing; sub-angstrom resolution; vertical distance sensitivities; Bandwidth; Biomembranes; Design optimization; Etching; Heating; Probes; Sensor phenomena and characterization; Silicon; Surfaces; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805454
Filename
4805454
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