Piezoelectric PZT Thin Films in the 100nm Range: A Solution for Actuators Embedded in Low Voltage Devices

This paper reports the piezoelectric properties of sputtered and sol gel PZT thin films investigated in a low thickness range (100-250 nm). Piezoelectric-elastic bimorphs including very thin PZT films were realized and the maximum reachable deflection at 5 V was characterized. The depoling effect experienced by the PZT versus the maximum post process temperature is also discussed which leads to the motivation of developing low thickness range PZT thin films. Elastic-piezoelectric bimorphs were realized and exhibited deflection higher than 5 mum at 5 V. Moreover, these bimorphs showed only a 10% decrease of the deflection after 5 billions cycles.