Development of Multi-User Multi-Chip SOI CMOS-MEMS Processes

Author

Takahashi, K. ; Mita, M. ; Nakada, M. ; Yamane, D. ; Higo, A. ; Fujita, H. ; Toshiyoshi, H.

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo, Tokyo

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

701

Lastpage

704

Abstract

This paper presents a new method of integrating multiple MEMS designs with 40 V class CMOS driver circuits in a multi-user-multi-chip manner. The multi-chip multi-user CMOS-MEMS process was done at 35 mm times 35 mm SOI chip. More than six different designs of SOI-bulk micromachined actuators including the pitch-tunable gratings were monolithically integrated onto the pre-fabricated high-voltage level-shifter circuits. We measured electro mechanical characteristics of the grating light valve integrated with high-voltage level-shifter and successfully demonstrated 1 MHz operation.

Keywords

CMOS integrated circuits; driver circuits; light valves; microactuators; micromechanical devices; silicon-on-insulator; CMOS driver circuits; SOI; actuators; electro mechanical characteristics; frequency 1 MHz; grating light valve; high-voltage level-shifter circuits; micromachining; multi-chip multi-user process; multiple MEMS designs; pitch-tunable gratings; size 35 mm; voltage 40 V; Actuators; Aerospace industry; CMOS process; CMOS technology; Etching; Fabrication; Gratings; Integrated circuit interconnections; Integrated circuit technology; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805479

Filename

4805479