Piezoelectric dynamic pressure sensor

This paper presents a novel piezoelectric dynamic pressure sensor, it consists of sensing element and inner preamplifier. The piezoelectric unimorph was used as sensing element. The charge amplifier with high input impedance was used to decrease the impedance of the unimorph and amplify the sensing signal. The properties of sensor were calculated and measured. The measured results show a sensitivity of 0.41mV/Pa, a good agreement with theoretic calculation, a pressure range of 1kPa, a linearity of 1% F.S, a response time of 40μs and a nature frequency of 8.5kHz. Compared with present congeneric sensors, it exhibits high sensitivity, simple structure and low cost.