Optically Programmable Self-Assembly of Heterogeneous Micro-Components on Unconventional Substrates

Self-assembly is a promising technique for fast and cost-effective integration of microcomponents especially at smaller scales. Methods are needed to program the self-assembly process so that we can assemble heterogeneous components necessary to build a complex system. Here we present a new method of programming the self-assembly process which is based on optically removing blocking polymer from designated receptor sites. In order to perform the self-assembly process we need to fabricate free-standing microcomponents and templates. Templates were fabricated on both plastic and glass. We have shown successful assembly of four types of silicon microcomponents on plastic. The blocking AZ4620 resist was removed from the designated receptor sites immediately prior to the assembly of the desired microcomponents by using optical masks, UV exposure, and resist developer. 98% yield of proper positioning of microcomponents on a plastic template was achieved within ~10min of pipetting the components onto a template in a fluidic medium.