Acceleration Compensation of MEMS Resonators using Electrostatic Tuning

Author

Yoneoka, S. ; Bahl, G. ; Salvia, J. ; Chen, K.L. ; Graham, A.B. ; Lee, H.K. ; Yama, G. ; Candler, R.N. ; Kenny, T.W.

Author_Institution

Stanford Univ., CA

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

805

Lastpage

808

Abstract

A method of using electrostatic tuning to compensate the phase noise due to external vibrations in a MEMS oscillator is presented in this paper. An accelerometer measures the acceleration applied to a resonator, and a compensation signal generated by the accelerometer is added to the bias voltage. We achieve 91% reduction of the acceleration sensitivity for sinusoidal accelerations from 100 Hz to 300 Hz using a double-ended tuning fork resonator. This is the first demonstration of active acceleration compensation for MEMS resonators.

Keywords

accelerometers; micromechanical resonators; oscillators; phase noise; tuning; MEMS oscillator; MEMS resonators; acceleration compensation; accelerometer; double-ended tuning fork resonator; electrostatic tuning; external vibrations; frequency 100 Hz to 300 Hz; phase noise; sinusoidal accelerations; Acceleration; Accelerometers; Electrostatic measurements; Micromechanical devices; Oscillators; Phase noise; Signal generators; Tuning; Vibrations; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805505

Filename

4805505