Title :
Gas-Liquid Separated Resonator for Bio-Chemical Application
Author :
Hida, H. ; Shikida, M. ; Okochi, M. ; Honda, H. ; Sato, K.
Author_Institution :
Dept. of Micro-Nano Syst. Eng., Nagoya Univ.
Abstract :
We have developed a novel type of gas-liquid separated micro-resonator for measuring the multifunctional characteristics of biological cells. The resonator consists of an area for the resonator/sensor (gas-phase) and one for the biochemical substance (liquid-phase), with a water-shedding wall separating them. The specimen support extends from the sensor body and passes through the water-shedding wall to the inside of the sample chamber We fabricated the comb-drive resonator on a silicon-on-insulator (SOI) wafer by using a deep reactive ion etching process and resonated it at around 2.5 kHz. Experimental results confirmed that the water-shedding wall was able to prevent solution leakage at the gap between the wall and the support.
Keywords :
bioMEMS; biochemistry; biomedical materials; cellular biophysics; etching; micromechanical resonators; molecular biophysics; silicon-on-insulator; Si; biochemical application; biological cells; comb drive resonator; etching; gas-liquid separated resonator; microresonator; silicon-on-insulator wafer; solution leakage; water shedding wall; Biochemical analysis; Biological cells; Biosensors; Dielectrophoresis; Electrodes; Force measurement; Micromechanical devices; Resonance; Sensor phenomena and characterization; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805532
