Gas-Liquid Separated Resonator for Bio-Chemical Application

Author

Hida, H. ; Shikida, M. ; Okochi, M. ; Honda, H. ; Sato, K.

Author_Institution

Dept. of Micro-Nano Syst. Eng., Nagoya Univ.

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

912

Lastpage

915

Abstract

We have developed a novel type of gas-liquid separated micro-resonator for measuring the multifunctional characteristics of biological cells. The resonator consists of an area for the resonator/sensor (gas-phase) and one for the biochemical substance (liquid-phase), with a water-shedding wall separating them. The specimen support extends from the sensor body and passes through the water-shedding wall to the inside of the sample chamber We fabricated the comb-drive resonator on a silicon-on-insulator (SOI) wafer by using a deep reactive ion etching process and resonated it at around 2.5 kHz. Experimental results confirmed that the water-shedding wall was able to prevent solution leakage at the gap between the wall and the support.

Keywords

bioMEMS; biochemistry; biomedical materials; cellular biophysics; etching; micromechanical resonators; molecular biophysics; silicon-on-insulator; Si; biochemical application; biological cells; comb drive resonator; etching; gas-liquid separated resonator; microresonator; silicon-on-insulator wafer; solution leakage; water shedding wall; Biochemical analysis; Biological cells; Biosensors; Dielectrophoresis; Electrodes; Force measurement; Micromechanical devices; Resonance; Sensor phenomena and characterization; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805532

Filename

4805532