DocumentCode
3046378
Title
Chaos in Electrostatically Actuated RF-MEMS Measured and Modeled
Author
Stulemeijer, J. ; Herfst, R.W. ; Bielen, J.A.
Author_Institution
Epcos SAW, Nijmegen
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
920
Lastpage
922
Abstract
Observation of period doubling bifurcations and chaos in electrostatically actuated RF-MEMS are reported in this paper for the first time. Period doubling, quadrupling and chaotic motion can clearly be observed in the measurement data. A 1D nonlinear device model is fitted to the capacitance versus voltage (C-V) curves and mechanical resonance curve data. The features of the observed bifurcation diagram have been reproduced with the 1D model.
Keywords
bifurcation; electrostatic actuators; 1D nonlinear device; RF-MEMS; chaotic motion; electrostatic actuators; mechanical resonance; period doubling bifurcations; quadrupling motion; Bifurcation; Capacitance; Capacitance-voltage characteristics; Chaos; Electrostatic measurements; Force measurement; Frequency; Radiofrequency microelectromechanical systems; Resonance; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805534
Filename
4805534
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