Title :
Analysis the slider resonate characteristic in liquid-phase epitaxy manufacturing process
Author :
Fang-Lin Chaoi ; Chao, Yu-Lin
Author_Institution :
ERSO/CCL, Ind. Technol. Res. Inst., Hsinchu, Taiwan
Abstract :
The resonance of the slider is one of the reasons that could affect the quality of small device fabrication. The results of simulation show that the resonant frequency and vibration amplitude depend on the geometry of the cavity. While the width of the slider cavity increases, the resonant frequency becomes lower
Keywords :
finite element analysis; integrated circuit manufacture; liquid phase epitaxial growth; resonance; semiconductor device manufacture; semiconductor growth; LPE process; cavity geometry; liquid-phase epitaxy manufacturing process; resonant frequency; simulation; slider resonance characteristic; vibration amplitude; Chaos; Epitaxial growth; Epitaxial layers; Gallium arsenide; Manufacturing processes; Resonant frequency; Rough surfaces; Shape; Substrates; Surface roughness;
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1994. Low-Cost Manufacturing Technologies for Tomorrow's Global Economy. Proceedings 1994 IEMT Symposium., Sixteenth IEEE/CPMT International
Conference_Location :
La Jolla, CA
Print_ISBN :
0-7803-2037-9
DOI :
10.1109/IEMT.1994.404733
