DocumentCode
3046590
Title
Analysis the slider resonate characteristic in liquid-phase epitaxy manufacturing process
Author
Fang-Lin Chaoi ; Chao, Yu-Lin
Author_Institution
ERSO/CCL, Ind. Technol. Res. Inst., Hsinchu, Taiwan
fYear
1994
fDate
12-14 Sep 1994
Firstpage
359
Abstract
The resonance of the slider is one of the reasons that could affect the quality of small device fabrication. The results of simulation show that the resonant frequency and vibration amplitude depend on the geometry of the cavity. While the width of the slider cavity increases, the resonant frequency becomes lower
Keywords
finite element analysis; integrated circuit manufacture; liquid phase epitaxial growth; resonance; semiconductor device manufacture; semiconductor growth; LPE process; cavity geometry; liquid-phase epitaxy manufacturing process; resonant frequency; simulation; slider resonance characteristic; vibration amplitude; Chaos; Epitaxial growth; Epitaxial layers; Gallium arsenide; Manufacturing processes; Resonant frequency; Rough surfaces; Shape; Substrates; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1994. Low-Cost Manufacturing Technologies for Tomorrow's Global Economy. Proceedings 1994 IEMT Symposium., Sixteenth IEEE/CPMT International
Conference_Location
La Jolla, CA
Print_ISBN
0-7803-2037-9
Type
conf
DOI
10.1109/IEMT.1994.404733
Filename
404733
Link To Document