DocumentCode :
3046596
Title :
Micro Liquid Prism
Author :
Yoshihata, Y. ; Takei, A. ; Binh-Khiem, N. ; Kan, T. ; Iwase, E. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Dept. of Mechano-Inf., Univ. of Tokyo, Tokyo
fYear :
2009
fDate :
25-29 Jan. 2009
Firstpage :
967
Lastpage :
970
Abstract :
This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400 mum in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.
Keywords :
micro-optics; optical prisms; surface plasmon resonance; ellipsoidal droplet; flat transparent plates float; liquid droplet; microliquid prism; prism faces; surface plasmon resonance measurement; surface tension; Gravity; Information science; Instruments; Optical films; Optical microscopy; Optical sensors; Resonance; Self-assembly; Shape measurement; Surface tension;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
ISSN :
1084-6999
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2009.4805546
Filename :
4805546
Link To Document :
بازگشت