Investigation on nonlinear analysis and correction method of piezoelectric sensors and actuators

Piezoelectric sensors and actuators have been widely used in various fields of production and daily life. However most piezoelectric crystals have nonlinear nature, especially piezoelectric ceramic, its inherent characteristics are nonlinear and hysteretic characteristic. In this paper, the nonlinear of piezoelectric crystals are analyzed from two major aspects, which are higher-order piezoelectric effect and multiple piezoelectric effects. The impaction of high-order piezoelectric effect and multiple piezoelectric effects on piezoelectric sensors and actuators are verified through the experiments, the compensation and correction methods are presented.